电子束 (Electron Beam) 负性光刻胶 (Negative Tone Resist) ma-N2400 and mr-EBL 6000 正性光刻胶 (Positive Tone Resist) mr-PosEBR
剥离胶 (Lift off Resist)
灰阶 (Greyscale)
混合聚合物 (Hybrid Polymer)
